Singe 150°C for 30 minutes
Spin at 7.5KRPM for 30 seconds. See PMMA spec sheet for thickness data.
Bake at hotplate 180°C for 15 mins
Develop in MIBK:IPA 1:3 for 45 secs. MIBK = Methyl IsoButyl Ketone
Rinse in IPA and blow dry with N2