Home About NRF New Users Equipment Safety Training Links
Why us
Facility Overview
Equipment Capabilities
Nanolab Staff
Facility Map
Directions to the Nanolab
New Equipment
Grant Proposals
Our charter is to provide first rate professionally managed use of clean room facilities to UCLA researchers, industry users, and other interested parties.

UCLA's Nanoelectronics Research Facility (NRF) is open to UCLA faculty and principal investigators, as well as non-UCLA researchers, for a modest hourly charge. Safety and equipment training is provided by lab management at no additional cost to users. The facility is open 7 days a week from 6AM- Midnight.
Users are charged a modest lab usage fee, which allows use of microscopes, fume hoods, and chemical processing. More complicated equipment, such as metal evaporators and dry etchers, require specialized training and an additional usage fee. Invoicing is done on a monthly basis.

Users are asked to furnish their own substrates. Deposition sources currently available are aluminum, titanium and aluminum/silicon. Gold and platinum are available with an additional charge. Clean room supplies and safety equipment are provided by the lab.

Chemicals available at no additional charge include:

  • Acetone
  • AZ400K Developer
  • Oleg 355 stripper
  • Bufferd Oxide Etch (6:1)
  • HMDS
  • Hydrogen Peroxide
  • Methanol
  • Nitric Acid
  • Ammonium Hydroxide
  • AZ Developer
  • AZ5214E Resist
  • Hydrofluoric Acid
  • Hydrochloric Acid
  • Isoproponol
  • Phosphoric Acid
  • Sulfuric Acid

NRF at a Glance

  • Facility Director: Prof. Jack Judy
  • Facility Manager: Steve Franz
  • 8000 Sq. ft class 1000 HEPA filtered clean room with an additional 500 sq. ft of class 100 space with temperature and humidity control
 
Facility Map (pdf)
Equipment Capabilities (pdf)
 
 
 
 
Contact Us Calendar Admin Copyright 2003 Nanoelectronics Reasearch Facility Questions or Comments? e-mail nanowebmaster@nanolab.ucla.edu