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About NRF
Facility Overview
Equipment Capabilities
Nanolab Staff
Facility Map
Directions to the Nanolab
New Equipment
Grant Proposals
The UCLA Nanoelectronics Research Facility offers many advantages that a commercial fabrication facility cannot offer.
  1. We offer over 30 years of experience in the industry.
  2. There is no membership fee. You only pay for what you use.
  3. We handle both silicon and compound semiconductor process.
  4. Handle up to 6 inch substrates.
  5. All equipment specs are documented and available on the web.
  6. All users are trained by experienced staff and users.
  7. Equipment Reservation and training is available through the web.
  8. Experience with commercial customers (over 70 in the past 4 years).
  9. Full complement of Cleanroom utilities, including high purity DI water, high purity Nitrogen, Reactive gases, chilled water, compressed air, etc...
 
Facility Map (pdf)
Equipment Capabilities (pdf)
 
 
 
 
Contact Us Calendar Admin Copyright 2003 Nanoelectronics Reasearch Facility Questions or Comments? e-mail Webmaster@nanolab.ucla.edu