The Nanoelectronics Research Facility is part of the Elecetrical Engineering Department at the University of California, Los Angeles. The facility has the following specs:

• 8000 Sq. ft class 1000 HEPA filtered clean room with an additional 500 sq. ft of class 100 space with temperature and humidity control
• Vibration-isolated floor, independently suspended from the building.
• High Purity Deionized water system (18 MOhm/cm) with filtration, UV bacteria removal etc.
• High purity (5 9's) bulk nitrogen gas delivery system, filtered at point of use.
• Full complement of utilities including chilled water, compressed air etc.
• 500 sq ft yellow room for processing photosensitive materials.
• Miscellaneous laminar flow hoods for class 100 work.
• 7 scrubber-exhausted fume hoods some with in deck temperature controlled baths, ultrasonic baths, automatic DI water dump rinsers etc. All fume hoods completely plumbed with high purity DI and high purity nitrogen.
• Remote toxic gas bunker with automatic purge panel and orbital-welded stainless steel lines for safe handling of poison and pyrophoric gases.
  
• Insitu, real-time toxic gas monitoring system.