Nanolab
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New ALD Tool

ALD

Fiji Thermal and Plasma Atomic Layer Deposition System (ALD) By Ultratech (Cambridge): Spec
New Demo Equipment
Mask
ULVAC High-Speed Spectroscopic Ellipsometer: Manual / Presentation
UCLA Nanoelectronics Research Facility

We offer expertise in micro and nano-technology fabrication equipment, as well as professionally managed use of cleanroom facilities to UCLA researchers, industry users, and other interested parties. We invite you to explore our website and contact us if we can be of service to you.

Learn about the Nanolab

Lab Capability (pdf) pdf

New User Orientations

Offered the first Friday of every month in Engineering IV room 57-124 from 9:15 am - 11:15 am. No need to enroll. Please bring a copy of the orientation slides with you.

Mailing List

Stay up-to-date on the latest NRF news, events, training sessions, and equipment updates.

Office: 310-206-8923

420 Westwood Plaza
14-131A Engineering IV Building
Los Angeles, CA 90095