User ID:

New ALD Tool


Fiji Thermal and Plasma Atomic Layer Deposition System (ALD) By Ultratech (Cambridge): Spec
New Ellipsometer
ULVAC High-Speed Spectroscopic Ellipsometer: Manual / Presentation
UCLA Nanoelectronics Research Facility

We offer expertise in micro and nano-technology fabrication equipment, as well as professionally managed use of cleanroom facilities to UCLA researchers, industry users, and other interested parties. We invite you to explore our website and contact us if we can be of service to you.

Learn about the Nanolab

Become a New User

Watch the orientation online and attend a safety test and walkthrough. See the calendar Calendar for the schedule.

Lab Capability (pdf) pdf

Mailing List

Stay up-to-date on the latest NRF news, events, training sessions, and equipment updates.

Office: 310-206-4641

420 Westwood Plaza
14-131A Engineering IV Building
Los Angeles, CA 90095